LIGO Document D1201032-v1

In-vacuum witnes plate fixture for a 4" silicon wafer - upper

Document #:
LIGO-D1201032-v1
Document type:
D - Drawings
Other Versions:
Abstract:
This part was designed by Cheryl Vorvick and Tyler Guidry, to hold 4" silicon wafers placed in the Ligo vacuum system to collect particulates for contamination analysis.
Topics:

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