LIGO Document E080177-v1
- This specification is for the non-volatile residue (NVR) cleanliness qualification by RGA testing of suspension structures which are to be installed into the BSC chambers of the LIGO facility. These structures include the ETM suspension, ITM suspension, FM suspension and BS suspension.
This specification does not address particulate contamination requirements or qualification, nor does it address other components of the suspension assemblies or other equipment which are installed into the LIGO UHV system.
- version v1 is identical to version A
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