LIGO Document G1400207-v1

Low temperature mechanical losses of oscillators fabricated in silicon wafers

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G - Presentations (eg Graphics)
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We present results of measurements of dissipation in silicon oscillators fabricated on the base of standard silicon wafers using anisotropic chemical wet etching. The measurements were carried out in the temperature range from room to liquid nitrogen temperature. Results and future plans are discussed.
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held from 17 Mar 2014 to 21 Mar 2014 in Nice, France

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