Jul 03, 2012 12:47:02 PM Residual Gas Analyzer Software RGA Software Version, 3.206.001 Pressure vs Time Scan Setup: Active channels in Scan, 2 Units, Torr Sample Period, 1.00, sec Focus Voltage, 90, Volts Ion Energy, HIGH Electron Energy, 70, eV CEM Voltage, 1032, Volts CEM Gain, 1.25E+003 Sensitivity Factor, 1.70E-004 Filament Current, 1.00, mAmps Start time, Jul 03, 2012 12:47:02 PM Channel, Mass(amu), Name, Cal Factor, Noise Floor, CEM Status 1 28.00 Nitrogen 1.00 1 OFF 2 18.00 Water 1.00 1 OFF Time(s) Channel#1 Channel#2 0.000, 1.4691E-007, 6.8611E-006, 3.042, 1.4834E-007, 6.8699E-006, 6.068, 1.4773E-007, 6.9003E-006, 9.126, 1.4733E-007, 6.9256E-006, 12.168, 1.4800E-007, 6.8491E-006, 15.210, 1.4734E-007, 6.9055E-006, 18.252, 1.4763E-007, 6.8311E-006, 21.278, 1.4833E-007, 6.9192E-006, 24.320, 1.4680E-007, 6.7463E-006, 27.378, 1.4622E-007, 6.7790E-006, 30.420, 1.4736E-007, 6.8646E-006, 33.462, 1.4756E-007, 6.8469E-006, 36.504, 1.4657E-007, 6.8520E-006, 39.530, 1.4729E-007, 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